Vacuum sensors operating in the 0.1–10 5 Pa pressure range are essential for vacuum monitoring and control across a wide variety of applications, especially in space exploration and semiconductor ...

Vacuum sensors are indispensable in cutting-edge fields ranging from semiconductor manufacturing to space exploration. Yet current technologies often trade measurement range for accuracy—or vice versa ...

A research team led by Profs. Chen Deyong and Wang Junbo from the Aerospace Information Research Institute (AIR) of the Chinese Academy of Sciences has developed a novel microsensor that enhances both ...